- cylindrical plasma (etching) reactor
- циліндровий [барабанний] плазмовий реактор
English-Ukrainian dictionary of microelectronics. 2013.
cylindrical plasma (etching) reactor
Смотреть что такое "cylindrical plasma (etching) reactor" в других словарях:
Inductively coupled plasma — An inductively coupled plasma (ICP) is a type of plasma source in which the energy is supplied by electrical currents which are produced by electromagnetic induction, that is, by time varying magnetic fields. [A. Montaser and D. W. Golightly, eds … Wikipedia
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